منابع مشابه
RF MEMS Switch Technology
Commercial Applications Solid state and electromagnetic relay switches are being replaced by MEMS switches due to their lower costs and increased application performance. Some of the benefits of MEMS switches include low power consumption, long life cycle, linearity and increased switching speeds. Applications include highspeed digital channel switching in automated test equipment, filter bank ...
متن کاملModularly Integrated MEMS Technology
Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation. Experimental and theoretical results that utilize two " Post-CMOS " integration approaches will be presented. The first integration approach uses SiGe MEMS technology for the " Post-CMOS " mo...
متن کاملMEMS applications of Ball Semiconductor Technology
Instead of using conventional flat and rectangular chip technology, our idea is to make semiconductor devices and sensors on 1mm-diameter spherical silicon (Ball) substrates. This paper describes five key enabling process technologies to realize Ball devices such as 3-axis accelerometer.
متن کاملMEMS Technology in Optical Layer Networks
The rate at which bandwidth demand in communications networks has grown has caused service providers to move rapidly to dense wavelength-division-multiplexed networks. This has in turn spawned a number of new application areas in which there is no clear technological winner, leaving room for new technologies such as MEMS to create inroads. In this paper, these applications are discussed and exa...
متن کاملReconfigurable Antenna Structures Using Mems Technology
The tunable characteristics of RF MEMS (Microelectromechanical Systems) components enable their integration with antennas providing numerous advantages such as reconfigurability in polarization, frequency, and radiation pattern [1]. Furthermore, the monolithic fabrication of these components with antennas can reduce parasitic effects, losses and costs. This paper presents two tunable frequency ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1997
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.117.399